Formation processes of nickel oxide nanoparticles in SiO2 by metal-ion implantation combined with thermal oxidation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 230, Issue 1-4, 2005, Pages 193-197

  Amekura, H ^a   Umeda, N ^a   Takeda, Y ^a   Lu, J ^a   Kono, K ^a   Kishimoto, N ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Ion implantation; NiO; Oxidation; Oxide nanoparticle; TEM observation

Indexed keywords

ABSORPTION; AGGLOMERATION; ANGLE MEASUREMENT; ANNEALING; DIFFUSION; FUSED SILICA; ION IMPLANTATION; NICKEL COMPOUNDS; OXIDATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICA; SOLUBILITY; TRANSMISSION ELECTRON MICROSCOPY; VACUUM APPLICATIONS;

METAL-ION IMPLANTATION; NIO; OXIDE NANOPARTICLE; TEM OBSERVATION; THERMAL OXIDATION;

NANOSTRUCTURED MATERIALS;

EID: 14844314166     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.12.039     Document Type: Conference Paper

References (16)

1. R. Lopez, T.E. Haynes, L.A. Boatner, L.C. Feldman, and R.F. Haglund Opt. Lett. 27 2002 1327
2. M. Ikeyama, S. Nakao, M. Tazawa, K. Kadono, and K. Kamada Nucl. Instr. and Meth. B 175-177 2001 652
3. M. Muroi, R. Street, and P.G. McCormick J. Appl. Phys. 87 2000 3242
4. J. Ishikawa, H. Tsuji, Y. Toyota, Y. Gotoh, K. Matsuda, M. Tanjyo, and S. Sakaki Nucl. Instr. and Meth. B 96 1995 7
5. Y.X. Liu, Y.C. Liu, D.Z. Shen, G.Z. Zhong, X.W. Fan, X.G. Kong, R. Mu, and D.O. Henderson Solid State Commun. 121 2002 531
6. H. Amekura, Y. Takeda, K. Kono, H. Kitazawa, and N. Kishimoto Rev. Adv. Mater. Sci. 5 2003 178
7. H. Amekura, N. Umeda, Y. Takeda, J. Lu, and N. Kishimoto Appl. Phys. Lett. 85 2004 1015
8. H. Amekura, H. Kitazawa, and N. Kishimoto Nucl. Instr. and Meth. B 219-220 2004 825
9. M.A. Lamkin, and F.L. Riley J. Eur. Cer. Soc. 10 1992 347
10. E.L. Williams J. Am. Cer. Soc. 48 1965 190
11. C.J. McHarge, G.C. Farlow, P.S. Sklad, C.W. White, A. Perez, N. Kornilios, and G. Marest Nucl. Instr. and Meth. B 19-20 1987 813
12. N. Kishimoto, Y. Takeda, V.T. Gritsyna, E. Iwamoto, T. Saito, in: J. Matsuo, G. Takaoka, I. Yamada (Eds.), IEEE Transactions from 1998 Int. Conf. Ion Implant. Tech. Proc. IEEE, 1999, p. 342
13. J.F. Ziegler, J.P. Biersack, and U. Littmark The Stopping and Range of Ions in Solids 1985 Pergamon New York Chapter 8. http://www.srim.org/
14. W. Moeller, and W. Eckstein Nucl. Instr. and Meth. B 2 1984 814
15. H. Amekura, and N. Kishimoto J. Appl. Phys. 94 2003 2585
16. H. Amekura, N. Umeda, Y. Takeda, H. Kitazawa, and N. Kishimoto Trans. Mater. Res. Soc. Jpn. 28 2003 465