The effect of microrelief evolution on the angular dependence of polycrystalline Cu sputtering yield

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 230, Issue 1-4, 2005, Pages 583-588

  Andrianova, N N ^a   Borisov, A M ^a   Mashkova, E S ^a   Nemov, A S ^a   Shulga, V I ^a  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

Developed surface topography; High dose ion bombardment; Sputtering

Indexed keywords

COMPUTER SIMULATION; DOSIMETRY; EROSION; GONIOMETERS; ION BOMBARDMENT; PHOTOMETRY; POLYCRYSTALLINE MATERIALS; SPUTTERING; SURFACE TOPOGRAPHY;

DEVELOPED SURFACE TOPOGRAPHY; HIGH-DOSE ION BOMBARDMENT; LASER GONIOPHOTOMETRY (LGP); SURFACE RELIEF;

COPPER;

EID: 14744292900     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2004.12.105     Document Type: Conference Paper

References (20)

1. G. Carter The physics and applications of ion beam erosion J. Phys. D: Appl. Phys. 34 2001 R1
2. G. Federici, C.H. Skinner, J.N. Brooks, J.P. Coad, C. Grisolia, A.A. Haasz, A. Hassanein, V. Philipps, C.S. Pitcher, J. Roth, W.R. Wampler, D.G. Whyte, Plasma-Material Interactions in Current Tokomaks and their Implications for Next-Step Fusion Reactors, IPP-Report 9/128, 2001
3. W. Hofer R. Behrisch K.M. Wittmaack Sputtering by Particle Bombardment III 1991 Springer Berlin (Chapter 2)
4. J.L. Whitton G. Kiriakidis G. Carter J.L. Whitton Erosion and Grouth of Solids Stimulated by Atom and Ion Beams 1986 Martinus Nijhoff Publishers Dordrecht (Chapter 9)
5. E.S. Mashkova, V.A. Molchanov, and G. Falcone Spatial Distributions of Particles Sputtered under Ion Bombardment. III. Oblique Incidence Surface Investigation 16 2001 1339
6. Y.N. Zhukova, E.S. Mashkova, V.A. Molchanov, V.M. Sotnikov, and W. Eckstein Poverkhnost 8-9 1994 107 (in Russian)
7. Y.N. Zhukova, E.S. Mashkova, V.A. Molchanov, V.M. Sotnikov, and W. Eckstein Izvestiya. Akad. Nauk. Ser. Phys. 58 1994 92 (in Russian)
8. U. Littmark, and W.O. Hofer J. Mater. Sci. 13 1978 2577
9. M. Küstner, W. Eckstein, V. Dose, and J. Roth J. Nucl. Mater. 265 1999 22
10. P. Beckmann P. Beckmann A. Spizzichino The Scattering of Electromagnetic Waves from Rough Surfaces 1963 Pergamon Press New York (Part I)
11. T.V. Vorburger, E.C. Teague, F.E. Scire, M.J. McLay, and D.E. Gilsinn J. Res. Natl. Bur. Stand. 89 1984 3
12. V.I. Shulga Radiat. Eff. 70 1983 65
13. V.I. Shulga Radiat. Eff. 82 1984 169
14. E.S. Mashkova, and V.A. Molchanov Medium-Energy Ion Reflection from Solids 1985 North-Holland Amsterdam
15. L.L. Balashova, A.M. Borisov, Sh.N. Garin, V.A. Molchanov, V.A. Snisar, and V.B. Fleurow Radiat. Eff. 84 1985 239
16. W.D. Wilson, L.G. Haggmark, and J.P. Biersack Phys. Rev. B 15 1997 2458
17. E.S. Mashkova, V.A. Molchanov, and V.I. Shulga Radiat. Eff. 62 1982 107
18. M.T. Robinson R. Behrisch Sputtering by Particle Bombardment I 1981 Springer Berlin (Chapter 3)
19. V.I. Shulga, and P. Sigmund Nucl. Instr. and Meth. B 119 1996 359
20. V.I. Shulga, and W. Eckstein Nucl. Instr. and Meth. B 145 1998 492