Fabrication of SMD 32.768 kHz tuning fork-type crystals: Photolithography and selective etching of an array of quartz tuning fork resonators

Werkstoffe und Korrosion

Volumn 52, Issue 9, 2001, Pages 712-715

  Lee, S ^a   Lee, J Y ^b   Park, T S ^b  

^a Ajou University   (South Korea)

^b Samsung Electro Mechanics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 14644430783     PISSN: 00432822     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-4176(200109)52:9<712::aid-maco712>3.0.co;2-g     Document Type: Article

References (10)

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