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Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 220-227

Influence of the aperture diameter on plasma transport through the annular anode of a vacuum arc plasma deposition system

Author keywords

Anode aperture diameter; Ion current measurement; Plasma transport efficiency; Vacuum arc plasma source

Indexed keywords

DUCTS; SATURATION (MATERIALS COMPOSITION); VACUUM DEPOSITED COATINGS;

ANODE APERTURE DIAMETER; MAGNETIC COILS; PLASMA TRANSPORT; VACUUM ARC DEPOSITION SYSTEM;

PLASMAS;

PLASMA TREATMENT;

EID: 14644423293 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2004.08.029 Document Type: Article

Times cited : (7)

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