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Volumn , Issue , 2003, Pages 367-370
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Towards a better EOT - Mobility trade-off in high-k oxide/metal gate CMOS devices
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Author keywords
[No Author keywords available]
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Indexed keywords
CMOS DEVICES;
HIGH-K OXIDES;
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EID: 14644421869
PISSN: 19308876
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ESSDERC.2003.1256890 Document Type: Conference Paper |
Times cited : (6)
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References (7)
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