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Volumn , Issue , 2003, Pages 367-370

Towards a better EOT - Mobility trade-off in high-k oxide/metal gate CMOS devices

Author keywords

[No Author keywords available]

Indexed keywords

CMOS DEVICES; HIGH-K OXIDES;

EID: 14644421869     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2003.1256890     Document Type: Conference Paper
Times cited : (6)

References (7)
  • 7
    • 84907703256 scopus 로고    scopus 로고
    • submitted to
    • F. Lime et al., submitted to WoDiM 2002
    • (2002) WoDiM
    • Lime, F.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.