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Volumn 188-189, Issue 1-3 SPEC.ISS., 2004, Pages 174-178

Deposition of CrN-MoS2 thin films by D.C. magnetron sputtering

Author keywords

Co deposition; CrN MoS2 thin film; D.C. magnetron sputtering

Indexed keywords

ELECTRIC POTENTIAL; HARDNESS; LUBRICANTS; MAGNETRON SPUTTERING; NITROGEN; SPUTTER DEPOSITION; THICKNESS MEASUREMENT; THIN FILMS;

EID: 14644392832     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.08.013     Document Type: Article
Times cited : (27)

References (10)
  • 10
    • 14644443678 scopus 로고    scopus 로고
    • paper presented at the AEPSE Conf. Sept. 28 - Oct. 3, 2003, Jeju, Korea
    • S.K. Kim B.C. Cha, paper presented at the AEPSE Conf. Sept. 28 - Oct. 3, 2003, Jeju, Korea
    • Kim, S.K.1    Cha, B.C.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.