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Surface and Coatings Technology

Volumn 151-152, Issue , 2002, Pages 55-58

Effects of substrate-bias on the structure of sputter-deposited Co-Pt film

(3) Shinmitsu, T a Shi, J a Hashimoto, M a

a UNIVERSITY OF ELECTRO COMMUNICATIONS (Japan)

Author keywords

Co Pt film; Preferential resputtering; Substrate bias

Indexed keywords

COATINGS; PLATINUM; SILICON; SPUTTERING;

ROOM TEMPERATURE;

COBALT;

CHEMICAL STRUCTURE; COBALT ALLOY; PLATINUM; SPUTTERING;

EID: 0036494924 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01585-7 Document Type: Article

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.