Surface profiling using phase shifting Talbot interferometric technique

Optical Engineering

Volumn 44, Issue 1, 2005, Pages 1-6

  Mirza, Saba ^a   Shakher, Chandra ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY DELHI   (India)

Author keywords

Fourier filtering; Phase shifting; Talbot interferometry

Indexed keywords

DIFFRACTION GRATINGS; INTERFEROMETERS; MOIRE FRINGES; PROFILOMETRY; SPECKLE; SPURIOUS SIGNAL NOISE; SURFACE TOPOGRAPHY;

FOURIER FILTERING; PHASE SHIFTING; TALBOT INTERFEROMETRY;

INTERFEROMETRY;

EID: 14544284530     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1827608     Document Type: Article

References (33)

1. M. Idesawa, T. Yatagai, and T. Soma, "Scanning moire method and automatic measurement of 3-D shapes," Appl. Opt. 16, 2152-2161 (1977).
2. T. Yatagai, M. Idesawa, and S. Saito, "Automatic topography using high precision digital moire methods," Proc. SPIE 36, 81-87 (1982).
3. M. Idesawa and T. Yatagai, "Interactive fringe pattern analysis and processing system," in Reprint Form Proc. of the 1st Int. Symp. on Medical Imaging and Image International ISMIII, pp. 554-558 (1982).
4. K. J. Gasvik, "Moire technique by means of digital image processing," Appl. Opt. 22, 3543-3547 (1983).
5. G. T. Reid, "Moire fringe metrology," Opt. Lasers Eng. 5, 63-93 (1983).
6. G. T. Reid, R. C. Rixion, and H. I. Messer, "Absolute and comparative measurement of three dimensional shape measuring moire topography," Opt. Laser Technol. 16, 315-319 (1984).
7. G. T. Reid and M. E. Fourney, "Projection moire using digital video processing: a technique for improving the accuracy and sensitivity," Trans. ASME 53, 652-656 (1986).
8. Y. B. Choi and S.-W. Kim, "Phase-shifting grating projection moiré topography," Opt. Eng. 37, 1005-1010 (1998).
9. I. Yamaguchi, J.-Y. Liu, and J.-I. Kato, "Active phase-shifting interferometers for shape and deformation measurements," Opt. Eng. 35, 2930-2937 (1996).
10. M. Takeda, H. Ina, and S. Kobayashi, "Fourier transform method of fringe-patern analysis for computer-based topography and interferometry," J. Opt. Soc. Am. 72, 156-160 (1982).
11. M. Takeda and K. Mutoh, "Fourier transform profilometry for the automatic measurement of 3-D object shapes," Appl. Opt. 22, 3977-3982 (1983).
12. M. Takeda and H. Yamamoto, "Fourier-transform speckle profilometry: three-dimensional shape measurements of diffuse objects with large height steps and/or spatially isolated surfaces," Appl. Opt. 33, 7829-7837 (1994).
13. X. Su and W. Chen, "Fourier transform profilometry a review," Opt. Lasers Eng. 35, 263-384 (2001).
14. A. M. Andreyev, V. M. Ginzburg, and N. M. Ramishili, "The use of the Talbot effect in dynamic measurements of deformed liquid/gas interface surface shape," Opt. Commun. 73, 429-433 (1989).
15. B. Javidi and E. Tajahuerce, "Three-dimensional object recognition by use of digital holography," Opt. Lett. 25, 610-612 (2000).
16. I. Yamaguchi, O. Inomoto, and J.-I. Kato, "Surface shape measurement by phase shifting digital holography," in Fringes 2001, Proc. 4th Int. Workshop on Automatic Processing of Fringe Patterns, pp. 365-372, Bremen, Germany (2001).
17. H. Kaijun, J. Jahns, and A. W. Lohman, "Talbot interferometry with a vibrating phase object," Opt. Commun. 45, 295-300 (1983).
18. S. Prakash, S. Upadhyay, and C. Shakher, "Real time out-of-plane vibration measurement/monitoring using Talbot interferometry," Opt. Lasers Eng. 34, 251-259 (2000).
19. M. Takeda and S. Kobayashi, "Lateral aberration measurements with a digital talbot interferometer," Appl. Opt. 23, 1760-1764 (1984).
20. B. K. A. Ngoi, K. Venkatakrishnan, and N. R. Sivakumar, "Phase-shifting interferometry immune to vibration," Appl. Opt. 40, 3211-3214 (2001).
21. K. Creath, "Phase shifting speckle interferometery," Appl. Opt. 24, 3053-3058 (1985).
22. M. I. Younus and M. Alam, "Enhanced phase stepped interferometery via appropriate filtering," Opt. Eng. 38, 1918-1923 (1999).
23. C. Wei, M. Chen, and Z. Wang, "General phase-stepping algorithm with automatic calibration of phase steps," Opt. Eng. 38, 1357-1360 (1999).
24. T. E. Carlsson and A. Wei, "Phase evaluation of speckle patterns during continuous deformation by use of phase shifting speckle interferometery," Appl. Opt. 39, 2628-2637 (2000).
25. W. Li and X. Su, "Real-time calibration algorithm for phase shifting in phase-measuring profilometery," Opt. Eng. 40, 761-766 (2001).
26. J. Burk, "2-D spectral error analysis for phase shifting formulas," in Fringes 2001, Proc. 4th Int. Workshop on Automatic Processing of Fringe Patterns, pp. 199-207, Bremen, Germany (2001).
27. H. Kadono, N. Takai, and T. Asakura, "New common-path phase shifting interferometer using a polarization technique," Appl. Opt. 26 898-905 (1987).
28. M. Cherbuliez and P. Jacquot, "Phase computation through wavelet analysis: Yesterday and nowadays," in Fringes 2001, Proc. 4th Int. Workshop on Automatic Processing of Fringe Patterns, pp. 154-162, Bremen, Germany (2001).
29. L. Angle, M. Tebaldi, and R. Henao, "Phase stepping in Lau interferometry," Opt. Commun. 164, 247-255 (1999).
30. J.E. Greivenkamp and J. H. Bruning, "Phase shifting interferometry," Chap. 14 in Malacara D, editor. Optical Shop Testing, 2nd ed., pp. 501-560, Wiley, New York (1992).
31. L. Holder, T. Okamoto, and T. Asakura, "Polarization phase shifting technique applied to a speckle correlation interferometer using an image fiber," Optik (Stuttgart) 96, 120-124 (1994).
32. K. J. Hume, "Optical projector and microscope," Chap. 5 in Engineering Metrology, pp. 107-128, Macdonald, London (1961).
33. "Measuring Projector PA-J3000," User's Manual, Series: 99MBA043A, Serial No-302.