Active phase-shifting interferometers for shape and deformation measurements

Optical Engineering

Volumn 35, Issue 10, 1996, Pages 2930-2937

  Yamaguchi, Ichirou ^a,b,c,d   Liu, Ji Yuan ^b   Kato, Jun Ichi ^a,d  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b SAITAMA UNIVERSITY   (Japan)

^c SPIE ^*

^d JAPAN SOCIETY OF APPLIED PHYSICS   (Japan)

Author keywords

Active optics; Deformation measurement; Feedback; Fringe analysis; Interferometry; Optical testing

Indexed keywords

EID: 0000953879     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.600956     Document Type: Article

References (15)

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