High-Q integrated on-chip micro-ring resonator

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 2, Issue , 2004, Pages 745-746

  Guo, Junpeng ^a   Shaw, Michael J ^a   Vawter, G Allen ^a   Esherick, Peter ^a   Hadley, G Ronald ^a   Sullivan, Charles T ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MICROPROCESSOR CHIPS; OXIDATION; PHOTOLITHOGRAPHY; Q FACTOR MEASUREMENT; SILICON NITRIDE; SILICON WAFERS; WAVEGUIDES;

LASER HEATING; MICRODISKS; PROPAGATION LOSS; REACTIVE ION ETCHING (RIE);

RESONATORS;

EID: 14344264250     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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