Deformable MEMS micromirror array for wavelength and angle insensitive retro-reflecting modulators

Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

Volumn 2, Issue , 2004, Pages 1007-1008

  Chan, T K ^a   Ford, J E ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONCAVE MICRO-LENSES; DIFFRACTION EFFECTS; MICROMIRROR ARRAYS; ZERO-ORDER REFLECTIVITY;

DIFFRACTION; ELECTRIC POTENTIAL; ELECTRIC POWER TRANSMISSION NETWORKS; LENSES; MIRRORS; MODULATORS; SIGNAL SYSTEMS;

ARRAYS;

EID: 14344263226     PISSN: 10928081     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. L. Zhou, J. M. Kahn and K. S. J. Pister, Journal of Micromechanical Systems, 12 (3). 233-242 (2003).
2. D Pedersen and O. Solgaard, Sensors and Actuators 83, 6-10 (2000).
3. J. Ford and J. Walker, United States Patent number 5,796,880, filed November 1996.
4. S. Sakarya, G. Vdovin and P. Sarro, SPIE Proc. 3760, 23-31 (1999).