Micromachined SLM based on pixelated reflective membranes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3760, Issue , 1999, Pages 23-31

  Sakarya, S ^a   Vdovin, G ^a   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE OPTICS; MEMBRANES; MICROMACHINING; SCHLIEREN SYSTEMS; SILICON NITRIDE;

DEFORMABLE MIRRORS;

LIGHT MODULATION;

EID: 0033358306     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)