Recursive PCA for adaptive process monitoring

Journal of Process Control

Volumn 10, Issue 5, 2000, Pages 471-486

  Li, Weihua ^a   Yue, H Henry ^a   Valle Cervantes, Sergio ^a   Qin, S Joe ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE ALGORITHMS; COMPUTATIONAL COMPLEXITY; CORRELATION METHODS; MATRIX ALGEBRA; RAPID THERMAL ANNEALING; SEMICONDUCTOR MATERIALS;

ADAPTIVE PROCESS MONITORING; LANCZOS TRIDIAGONALIZATION; RANK-ONE MODIFICATION; RECURSIVE PRINCIPAL COMPONENT ANALYSIS (PCA);

STATISTICAL PROCESS CONTROL;

EID: 0034301495     PISSN: 09591524     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0959-1524(00)00022-6     Document Type: Article

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