Development of a web-services-based e-diagnostics framework for semiconductor manufacturing industry

IEEE Transactions on Semiconductor Manufacturing

Volumn 18, Issue 1, 2005, Pages 122-135

  Hung, Min Hsiung ^a   Cheng, Fan Tien ^b   Yeh, Sze Chien ^c  

^a NATIONAL DEFENSE UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c Pou Chen Group   (Taiwan)

Author keywords

Authentication service; Web service agent; Web services based e diagnostics framework (WSDF)

Indexed keywords

DATA ACQUISITION; DATABASE SYSTEMS; INFORMATION RETRIEVAL; INTEGRATION; WORLD WIDE WEB;

AUTHENTICATION SERVICES; DATA INTEGRATION; WEB-SERVICE AGENTS; WEB-SERVICES-BASED E-DIAGNOSTICS FRAMEWORK (WSDF);

SEMICONDUCTOR MATERIALS;

EID: 13844276770     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2004.836664     Document Type: Article

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