Design challenges in vacuum robotics

Solid State Technology

Volumn 39, Issue 10, 1996, Pages 62-70

  Korczynski, Ed ^a,b,c  

^a Solid State Technology

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c Materials Research Society   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INDUSTRIAL ROBOTS; MAGNETIC COUPLINGS; ROBOTICS; VACUUM TECHNOLOGY;

ULTRA-HIGH VACUUM (UHV) CONDITIONS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030251531     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (1)

1. A. Chambers, R.K. Fitch, B.S. Halliday, Basic Vacuum Technology, Adam Hilger imprint, IOP Publishing Ltd., p. 108, 1989.