Fabrication and modeling of narrow capillaries for vacuum system gas inlets

Journal of Applied Physics

Volumn 97, Issue 4, 2005, Pages

  Quaade, Ulrich J ^a   Jensen, Søren ^a   Hansen, Ole ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

GAS FLOW; GAS PUMPING; MICROREACTORS; VACUUM CHAMBER;

CAPILLARY FLOW; CHEMICAL REACTORS; MASS SPECTROMETERS; PERTURBATION TECHNIQUES; QUARTZ; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; VACUUM TECHNOLOGY;

CAPILLARY TUBES;

EID: 13744254056     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1829377     Document Type: Article

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