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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 12, 2004, Pages 8195-8198

Epitaxial growth of MgO-doped lithium niobate thin films by metalorganic chemical vapor deposition

(5) Iwai, Makoto a Ohmori, Makoto a Yoshino, Takashi a Yamaguchi, Shoichiro a Imaeda, Minoru a

a NGK INSULATORS LTD (Japan)

Author keywords

Epitaxial growth; LiNbO3 (LN); Metalorganic chemical vapor deposition (MOCVD); Stoichiometric; Thin film; Waveguide

Indexed keywords

CRYSTALLINE MATERIALS; DOPING (ADDITIVES); EPITAXIAL GROWTH; LITHIUM NIOBATE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; PRODUCTIVITY; STOICHIOMETRY; THIN FILMS; WAVEGUIDES; X RAY DIFFRACTION ANALYSIS;

LASER LIGHT SOURCES; LINBO3 (LN); SPACE MAPPING; SUBSTRATE ADHESION;

MAGNESIA;

EID: 13644273228 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.8195 Document Type: Article

Times cited : (5)

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