SCOPUS 정보 검색 플랫폼

Surface Science

Volumn 357-358, Issue , 1996, Pages 954-960

Production of dense and oriented structures including titanium nitride by energetic condensation from plasmas

(4) McKenzie, D R a McFall, W D a Nguyen, H H a Yin, Y a

a UNIVERSITY OF SYDNEY (Australia)

Author keywords

Growth; Ion implantation; Nitrides; Polycrystalline thin films; Surface stress

Indexed keywords

COMPRESSIVE STRESS; ENERGETIC CONDENSATION; ENERGY DISTRIBUTION; POLYCRYSTALLINE THIN FILMS; PREFERRED ORIENTATION EFFECTS; STRESS LEVEL; SURFACE STRESS;

CONDENSATION; ELECTRIC CONDUCTIVITY; ELLIPSOMETRY; EVAPORATION; ION IMPLANTATION; MATHEMATICAL MODELS; PLASMA APPLICATIONS; PLASMAS; POLYCRYSTALLINE MATERIALS; SURFACE STRUCTURE; THIN FILMS; TITANIUM NITRIDE;

FILM GROWTH;

EID: 13544253849 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/0039-6028(96)00298-1 Document Type: Article

Times cited : (6)

References (11)

1
- 0344917553
- P.J. Martin, H.A. Macleod, R.P. Netterfield, W.G. Sainty and C.G. Pacey, Appl. Opt. 22 (1933) 179.
- (1933) Appl. Opt. , vol.22 , pp. 179
- Martin, P.J.¹ Macleod, H.A.² Netterfield, R.P.³ Sainty, W.G.⁴ Pacey, C.G.⁵

2
- 0027578647
- C.A. Davis, Thin Solid Films 226 (1993) 30.
- (1993) Thin Solid Films , vol.226 , pp. 30
- Davis, C.A.¹

3
- 0000721676
- D.R. McKenzie, J. Vac. Sci. Techn, B 11 (1993) 1928.
- (1993) J. Vac. Sci. Techn, B , vol.11 , pp. 1928
- McKenzie, D.R.¹

4
- 0029754149
- D.R. McKenzie, W.D. McFall, S. Reisch, B.W. James, I.S. Falconer, R.W. Boswell, H. Persing, A.J. Perry and A. Durandet, Surf. Coat. Techn. 78 (1996) 255.
- (1996) Surf. Coat. Techn. , vol.78 , pp. 255
- McKenzie, D.R.¹ McFall, W.D.² Reisch, S.³ James, B.W.⁴ Falconer, I.S.⁵ Boswell, R.W.⁶ Persing, H.⁷ Perry, A.J.⁸ Durandet, A.⁹

5
- 21544477583
- D.R. McKenzie, W.D. McFall, W.G. Sainty and R.E. Collins, Diamond Relat. Mater. 2 (1993) 970.
- (1993) Diamond Relat. Mater. , vol.2 , pp. 970
- McKenzie, D.R.¹ McFall, W.D.² Sainty, W.G.³ Collins, R.E.⁴

6
- 5244340635
- R.W. Boswell, Phys. Lett. A 33 (1970) 457.
- (1970) Phys. Lett. A , vol.33 , pp. 457
- Boswell, R.W.¹

7
- 21844502545
- G. Giroult-Mattakowski, C. Charles, A. Durandet, R.W. Boswell, S. Armand, H.M. Persing, A.J. Perry, P.D. Lloyd, S.R. Hyde and D. Bogsanyi, J. Vac. Sci. Techn. A 12 (1994) 2754.
- (1994) J. Vac. Sci. Techn. A , vol.12 , pp. 2754
- Giroult-Mattakowski, G.¹ Charles, C.² Durandet, A.³ Boswell, R.W.⁴ Armand, S.⁵ Persing, H.M.⁶ Perry, A.J.⁷ Lloyd, P.D.⁸ Hyde, S.R.⁹ Bogsanyi, D.¹⁰

8
- 0025417151
- A. Skerlavaj, Y. Glaesson and C.G. Ribbing, Thin Solid Films 186 (1990) 15.
- (1990) Thin Solid Films , vol.186 , pp. 15
- Skerlavaj, A.¹ Glaesson, Y.² Ribbing, C.G.³

9
- 0028076386
- A. Bendavid, P.J. Martin, R.P. Netterfield and T.J. Kinder, Surf. Coat. Techn. 70 (1994) 97.
- (1994) Surf. Coat. Techn. , vol.70 , pp. 97
- Bendavid, A.¹ Martin, P.J.² Netterfield, R.P.³ Kinder, T.J.⁴

10
- 0024142779
- D.S. Rickerby, A.M. Jones and B.A. Bellamy, Surf. Coat. Techn. 36 (1988) 661.
- (1988) Surf. Coat. Techn. , vol.36 , pp. 661
- Rickerby, D.S.¹ Jones, A.M.² Bellamy, B.A.³

11
- 0024620131
- A.J. Perry, Thin Solid Films 170 (1989) 63.
- (1989) Thin Solid Films , vol.170 , pp. 63
- Perry, A.J.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.