Improved polarization ray tracing of thin-film optical coatings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5524, Issue , 2004, Pages 261-272

  Wesner, Joachim ^a   Eisenkrämer, Frank ^a   Heil, Joachim ^a   Sure, Thomas ^a  

^a Leica Microsystems GmbH   (Germany)

Author keywords

Air spaced design; AR coating; DUV; High NA; Polarization aberrations; Ray tracing; Thin film

Indexed keywords

ELECTROMAGNETIC WAVE POLARIZATION; LITHOGRAPHY; OPTICAL DESIGN; OPTICAL TRANSFER FUNCTION; PHASE SHIFT; RAY TRACING; THIN FILMS;

AIR-SPACED DESIGN; AR COATING; DEEP UV (DUV); HIGH NUMERICAL APERTURE; POLARIZATION ABERRATIONS;

OPTICAL COATINGS;

EID: 13444306553     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.559971     Document Type: Conference Paper

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