Wavelength tunable thermo-optic filter using buckling effect of etalon composed poly-Si/SiO2 multi-layers

Optical Materials

Volumn 27, Issue 5, 2005, Pages 787-791

  Park, Hun Yong ^a   Park, Chong Hun ^a   Hwang, Byung Chul ^a   Lee, Seung Gol ^a   Beom Hoan, O ^a   Lee, El Hang ^a   Choi, Doo Sun ^b   Park, Se Geun ^a  

^a Inha University   (South Korea)

^b Korea Institute of Machine and Materials   (South Korea)

Author keywords

Buckling effect; Fabry Perot resonator; Thermo optic filter

Indexed keywords

BANDWIDTH; BUCKLING; CAVITY RESONATORS; ERRORS; ETALONS; MIRRORS; MONITORING; MULTILAYERS; POLYSILICON; REFRACTIVE INDEX; THERMAL EXPANSION; TUNING;

BUCKLING EFFECTS; FABRY-PEROT RESONATOR; THERMAL EXPANSION COEFFICIENTS; THERMO-OPTIC FILTERS;

OPTICAL FILTERS;

EID: 13444302678     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optmat.2004.08.016     Document Type: Conference Paper

References (9)

1. D. Hohlfeld, M. Epmeier, and H. Zappe Sensor Actuator A 103 2003 93
2. M. Aziz, J. Pfeiffer, M. Wohlfarth, C. Luber, S. Wu, and P. Meissner IEEE Photon. Tech. Lett. 12 2000 1522
3. S.S. Yun, and J.H. Lee Proc. SPIE 4983 2003 195
4. P. Meisner, M. Aziz, H. Halbritter, F. Riemenschneider, J. Pfeiffer, T. Hermes, Electronic Components and Technology Conference, 2002, p. 34
5. D.S. Popescu, D.C. Dascalu, M. Elwenspoek, T. Lammerink, The Eighth International Conference on Solid-State Sensors and Actuators, vol. 2, 1995, p. 305
6. L. Lin, and S.H. Lin Sensor Actuator A 71 1998 35
7. E. Hecht Optics fourth ed. 2002 Addison Wesley Longman Reading p. 93
8. H.A. Macleod Thin Film Optical Filters third ed. 2001 IoP NY p. 12
9. Haruo Takashashi Appl. Optics 34 1995 667