Microwave properties of thin BSTO films based varactors for high frequency applications

Integrated Ferroelectrics

Volumn 55, Issue , 2003, Pages 871-876

  Razumov, S V ^a   Tumarkin, A V ^a   Gagarin, A G ^a   Sysa, M V ^a   Gaidukov, M M ^a   Mironenko, P V ^a   Zemtsov, A V ^a  

^a SAINT PETERSBURG ELECTROTECHNICAL UNIVERSITY LETI   (Russian Federation)

Author keywords

BaSrTiO3; RF magnetron sputtering

Indexed keywords

BARIUM COMPOUNDS; ELECTRODES; FILM GROWTH; MAGNETRON SPUTTERING; MICROWAVES; VARACTORS;

BASRTIO3; RF MAGNETRON SPUTTERING; TUNABILITY;

THIN FILMS;

EID: 13444285505     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580390259326     Document Type: Article

References (9)

1. A. Kozyrev, V. Keis, O. Buslov, A. Ivanov, O. Soldatenkov, V. Loginov, A. Taricin, and J. Graul, Integr. Ferroelectr. 34, 271 (2001).
2. A. B. Kozyrev, A. V. Ivanov, O. I. Soldatenkov, A. V. Tumarkin, S. V. Razumov, and S. Yu. Aigunova, Techn. Phys. Lett. 27, 1032 (2002).
3. A. B. Kozyrev, M. M. Gaidukov, A. G. Gagarin, A. V. Tumarkin, and S. V. Razumov, Techn. Phys. Lett. 28, 239 (2002).
4. J. D. Baniecki, R. B. Laibowitz, T. W. Shaw, P. R. Duncombe, D. A. Neumayer, D. E. Kotecki, H. Shen, and Q. Y. Ma, Appl. Phys. Lett. 72, 498 (1998).
5. S. V. Razumov, A. V. Tumarkin, M. M. Gaidukov, A. G. Gagarin, A. B. Kozyrev, O. G. Vendik, A. V. Ivanov, O. U. Buslov, V. N. Keys, L. C. Sengupta, and X. Zhang, Appl. Phys. Lett. 81, 1675 (2002).
6. S. V. Razumov and A. V. Tumarkin, Techn. Phys. Lett. 26, 705 (2000).
7. M. M. Gaidukov, A. B. Kozyrev, A. S. Ruban, L. T. Ter-Martirosyan, and T. H. Verbitskaya, Radiotechnika i Elektronika 20, 2588 (1975), in Russian.
8. O. G. Vendik and M. A. Nikol'ski, Tech. Phys. Lett. 29, 184 (2003).
9. O. G. Vendik (Ed.), Ferroelectrics on microwaves, Moscow, Sov. Radio, 1979, in Russian.