Growth behavior and optical properties of metal-nanoparticle dispersed dielectric thin films formed by alternating sputtering

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 68-73

  Cho, S H ^a   Lee, S ^a   Ku, D Y ^b   Lee, T S ^c   Cheong, B ^c   Kim, W M ^c   Lee, K S ^c  

^a Ajou University   (South Korea)

^b Hankuk Aviation University   (South Korea)

^c Korea Institute of Science and Technology   (South Korea)

Author keywords

Alternating sputtering; Dielectric matrix; Optical properties

Indexed keywords

DIELECTRIC FILMS; ELECTRONS; ELLIPSOMETRY; FILM GROWTH; LIGHT ABSORPTION; NANOSTRUCTURED MATERIALS; PARTICLE SIZE ANALYSIS; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY;

ALTERNATING SPUTTERING; DIELECTRIC MATRIX; SURFACE PLASMON BANDS;

THIN FILMS;

EID: 1342344912     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.09.024     Document Type: Conference Paper

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