Temporal development of sputtered atom distributions from Au(1 1 1) targets following bombardment with 100 keV/atom Au2 ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 217, Issue 2, 2004, Pages 253-261

  Shapiro, M H ^a,b   Tombrello, T A ^b  

^a CALIFORNIA STATE UNIVERSITY   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Angular distributions; Energy distributions; Sputtered atoms; Sputtering

Indexed keywords

ATOMIC FORCE MICROSCOPY; BINDING ENERGY; COMPUTER SIMULATION; ION BOMBARDMENT; ION IMPLANTATION; MOLECULAR DYNAMICS; SPUTTERING; TARGETS;

ANGULAR DISTRIBUTIONS; COLLISION CASCADES; ENERGY DISTRIBUTIONS; SPUTTERED ATOMS;

GOLD;

EID: 1342308329     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2003.11.007     Document Type: Article

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