Extraction of Material Parameters in Film Bulk Acoustic Resonator (FBAR) Using Genetic Algorithm

IEEE Electron Device Letters

Volumn 25, Issue 2, 2004, Pages 67-69

  Lee, Jeongheum ^a,b   Jung, Jaeyong ^b   Park, Jong Il ^a   Kim, Hyeongdong ^a  

^a Hanyang University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

Film bulk acoustic resonator (FBAR); Genetic algorithm; Piezoelectric material parameter extraction

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC WAVE PROPAGATION; BANDWIDTH; CAPACITANCE; COMPUTER SIMULATION; GENETIC ALGORITHMS; NATURAL FREQUENCIES; OPTIMIZATION; PIEZOELECTRIC MATERIALS; RESONANCE;

FILM BULK ACOUSTIC RESONATORS (FBAR); PIEZOELECTRIC MATERIAL PARAMETER EXTRACTION;

ACOUSTIC RESONATORS;

EID: 1342308181     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2003.819911     Document Type: Article

References (5)

1. K. M. Lakin, G. R. Kline, and K. T. McCarron, "High-Q microwave acoustic resonators and filters," IEEE Trans. Microwave Theory Tech., vol. 41, pp. 2139-2146, Dec. 1993.
2. Y. Zhang, Z. Wang, and J. D. N. Cheeke, "Resonant Spectrum Method to Characterize Piezoelectric Films in Composite Resonator," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 50, pp. 321-333, Mar. 2003.
3. R. S. Naik, J. J. Lutsky, R. Rief, and C. G. Sodini, "Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 45, pp. 257-263, Jan. 1998.
4. V. M. Ristic, Principles of Acoustic Devices. New York: Wiley, 1983.
5. Y. Rahmat-Samii and E. Michielssen, Electromagnetic Optimization by Genetic Algorithms. New York: Wiley, 1999.