Partial-pressure measurement of atmospheric-pressure binary gas using two pressure gauges

Vacuum

Volumn 73, Issue 2, 2004, Pages 301-304

  Kurokawa, Akira ^a   Odaka, Kenji ^a   Ichimura, Shingo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Atmospheric pressure; Binary gas; Capacitance manometer; Crystal friction gauge; Partial pressure; Viscosity

Indexed keywords

ATMOSPHERIC PRESSURE; CAPACITANCE; MANOMETERS; OZONE; PRESSURE GAGES; VISCOSITY OF GASES;

BINARY GAS; CAPACITANCE MANOMETER; CRYSTAL FRICTION GAUGES;

PARTIAL PRESSURE;

EID: 1342306865     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2003.12.018     Document Type: Conference Paper

References (2)

1. Nishiguchi T., Nonaka H., Ichimura S., Morikawa Y., Kekura M., Miyamoto M. Appl. Phys. Lett. 81:2002;2190.
2. Kokubun K., Hirata M., Ono M., Murakami H., Toda Y. J Vac Sci Technol. A5:1987;2450.