Improved mechanical properties of optical coatings via an enhanced sputtering process

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 20-25

  West, G T ^a   Kelly, P J ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Magnetron sputtering; Spectrophotometry; Sputtering process

Indexed keywords

ATOMIC FORCE MICROSCOPY; MAGNETRON SPUTTERING; SPECTROPHOTOMETRY; STRENGTH OF MATERIALS; THIN FILMS; TIN; TITANIUM DIOXIDE; WEAR OF MATERIALS; WEAR RESISTANCE; X RAY DIFFRACTION ANALYSIS;

SPUTTERING PROCESS; SPUTTERING SYSTEMS;

OPTICAL COATINGS;

EID: 1342305092     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.09.011     Document Type: Conference Paper

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