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Volumn 15, Issue 2, 2004, Pages 377-383

Micromachined strain gauges for the determination of liquid flow friction coefficients in microchannels

(2)  Baviere, R a,b   Ayela, F a  

a CNRS   (France)
b LEGI   (France)

Author keywords

Microfluidics; Micromachining; Sensors; Strain gauges

Indexed keywords

FLOW OF FLUIDS; FRICTION; MICROMACHINING; PRESSURE DROP; PRESSURE MEASUREMENT; REYNOLDS NUMBER; SILICON NITRIDE;

EID: 1342265666     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/15/2/010     Document Type: Article
Times cited : (16)

References (9)
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    • Experimental and numerical investigation into the flow characteristics of channels etched in (100) silicon
    • Flockhart S M and Dhariwal R S 1998 Experimental and numerical investigation into the flow characteristics of channels etched in (100) silicon J. Fluid Eng. 120 291-5
    • (1998) J. Fluid Eng. , vol.120 , pp. 291-295
    • Flockhart, S.M.1    Dhariwal, R.S.2
  • 2
    • 0036838388 scopus 로고    scopus 로고
    • Scale effects on hydrodynamics and heat transfer in two-dimensional mini and microchannels
    • Gao P, Le Person S and Favre-Marinet M 2002 Scale effects on hydrodynamics and heat transfer in two-dimensional mini and microchannels Int. J. Thermal Sci. 41 1017-27
    • (2002) Int. J. Thermal Sci. , vol.41 , pp. 1017-1027
    • Gao, P.1    Le Person, S.2    Favre-Marinet, M.3
  • 3
    • 0034333543 scopus 로고    scopus 로고
    • Heat transfer for water flow in trapezoidal silicon microchannels
    • Qu W, Mala G M and Li D 2000 Heat transfer for water flow in trapezoidal silicon microchannels Int. J. Heat Mass Transfer 43 3925-36
    • (2000) Int. J. Heat Mass Transfer , vol.43 , pp. 3925-3936
    • Qu, W.1    Mala, G.M.2    Li, D.3
  • 4
    • 0008328359 scopus 로고    scopus 로고
    • Flow characteristics of water in microtubes
    • Mala G M and Li D 1999 Flow characteristics of water in microtubes Int. J. Heat Fluid Flow 20 142-8
    • (1999) Int. J. Heat Fluid Flow , vol.20 , pp. 142-148
    • Mala, G.M.1    Li, D.2
  • 5
    • 0034272301 scopus 로고    scopus 로고
    • Scale effects on fluid flow and heat transfer in microchannels
    • Sabry M N 2000 Scale effects on fluid flow and heat transfer in microchannels IEEE Trans. Components Packaging Technol. 23 562-7
    • (2000) IEEE Trans. Components Packaging Technol. , vol.23 , pp. 562-567
    • Sabry, M.N.1
  • 6
    • 0035912926 scopus 로고    scopus 로고
    • Interfacial electrokinetic effects on liquid flow in microchannels
    • Reu L, Qu W and Li D 2001 Interfacial electrokinetic effects on liquid flow in microchannels Int. J. Heat Mass Transfer 44 3125-34
    • (2001) Int. J. Heat Mass Transfer , vol.44 , pp. 3125-3134
    • Reu, L.1    Qu, W.2    Li, D.3
  • 7
    • 0037416659 scopus 로고    scopus 로고
    • Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment
    • Malhaire C and Barbier D 2003 Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment Thin Solid Films 427 362-6
    • (2003) Thin Solid Films , vol.427 , pp. 362-366
    • Malhaire, C.1    Barbier, D.2
  • 8
    • 0036852862 scopus 로고    scopus 로고
    • A silicon micromachined microphone for fluid mechanics research
    • Huang C, Naguib A, Soupos E and Najafi K 2002 A silicon micromachined microphone for fluid mechanics research J. Micromech. Microeng. 12 767-74
    • (2002) J. Micromech. Microeng. , vol.12 , pp. 767-774
    • Huang, C.1    Naguib, A.2    Soupos, E.3    Najafi, K.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.