Dielectric function of thin-film titanium oxide with a granular nanostructure

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 2658-2662

  Sorbello, R S ^a   Deloach, J D ^a,c   Aita, C R ^a   Fejes, P ^b  

^a UNIVERSITY OF WISCONSIN MILWAUKEE   (United States)

^b MOTOROLA INC   (United States)

^c TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FUNCTIONS; GRANULAR NANOSTRUCTURES; INFRARED ABSORPTION-REFLECTION SPECTROSCOPY (IRAS); MAXWELL-GARNETT MODEL;

CRYSTAL LATTICES; CRYSTAL ORIENTATION; DIELECTRIC FILMS; ELECTRON DIFFRACTION; GRAIN BOUNDARIES; NANOSTRUCTURED MATERIALS; POLARIZATION; RAMAN SPECTROSCOPY; SINGLE CRYSTALS; SPUTTER DEPOSITION; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

TITANIUM OXIDES;

EID: 13244298649     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1808743     Document Type: Article

References (17)

1. J. DeLoach and C. R. Aita, J. Vac. Sci. Technol. A 16, 1963 (1998).
2. J. D. DeLoach, O. Scarel, and C. R. Aita, J. Appl. Phys. 85, 2377 (1999).
3. V. V. Yakovlev, O. Scarel, C. R. Aita, and S. Mochizuki, Appl. Phys. Lett. 76, 1107 (2000).
4. G. Scarel, C. J. Hirschmugl, V. V. Yakovlev, R. S. Sorbello, and C. R. Aita, J. Appl. Phys. 91, 1118 (2002).
5. R. J. Gonzalez, R. Zallen, and H. Berger, Phys. Rev. B 55, 7014 (1997).
6. J. C. Maxwell-Garnett, Philos. Trans. R. Soc. London 203, 385 (1904); 205, 237 (1905).
7. J. C. Maxwell-Garnett, Philos. Trans. R. Soc. London 203, 385 (1904); 205, 237 (1905).
8. R. Landauer, in Electrical Transport and Optical Properties of Inhomogeneous Media, edited by J. C. Garland and D. B. Tanner (American Institute of Physics, Melville, NY, 1978), p. 2.
9. C. F. Bohren and D. R. Huffman, Absorption and Scattering of Light by Small Particles (Wiley, New York, 1983).
10. C. Pecharroman and J. E. Iglesias, Phys. Rev. B 49, 7137 (1994).
11. E. H. Kerner, Proc. Phys. Soc. London, Sect. B 69, 802 (1956).
12. H. Fritzsche, in Amorphous and Liquid Semiconductors, edited by J. Taue (Plenum, London, 1974), pp. 243-248.
13. J. A. Floro, S. J. Herne, J. A. Hunter, P. Kotula, E. Chason, S. C. Seel, and C. V. Thompson, J. Appl. Phys. 89, 4886 (2001).
14. K. Kosuge, Chemistry of Non-Stoichiometric Compounds (Oxford University Press, Oxford, 1994), p. 116.
15. M. D. Banus, T. B. Reed, and A. J. Strauss, Phys. Rev. B 5, 2775 (1972).
16. D. J. Kester and R. Messier, J. Mater. Res. 8, 1928 (1993), and references within.
17. P. Knauth and H. L. Tuller, J. Appl. Phys. 85, 897 (1999).