Patterned grafting of polymer brushes onto flexible polymer substrates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3191-3195

  Padeste, Celestino ^a   Solak, Harun H ^a   Brack, Hans Peter ^a,b   Slaski, Michal ^a   Gürsel, Selmiye Alkan ^a   Scherer, Günther G ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EXTREME ULTRAVIOLET (EUV) RADIATION; POLYMER BRUSHES; POLYMER CHAINS; POLYMER SUBSTRATES;

COMPOSITION; PHOTORESISTS; POLYMERIZATION; SAMPLING; SELF ASSEMBLY; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION;

GRAFT COPOLYMERS;

EID: 13244288711     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1805542     Document Type: Conference Paper

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