SCOPUS 정보 검색 플랫폼

Materials Science Forum

Volumn 338, Issue , 2000, Pages

Micropipe healing in liquid phase epitaxial growth of SiC

(6) Yakimova, R a Syvajarvi M a Rendakova, S b Dimitriev, V A b,c Henry, A a Janzen E a

a LINKÖPING UNIVERSITY (Sweden)

b TDI Inc (United States)

c HOWARD UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; INTERFACIAL ENERGY; LIQUID PHASE EPITAXY; MATHEMATICAL MODELS; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH; SILICON WAFERS; SUBLIMATION; THICK FILMS;

MICROPIPE HEALING;

SILICON CARBIDE;

EID: 12944291597 PISSN: 02555476 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Article

Times cited : (10)

References (10)

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2
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3
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4
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- R. Yakimova, M. Tuominen, A. S. Bakin, J. O. Fornell, A. Vehanen, and E. Janzén, Proc. Int. Conf. on Silicon Carbide and Related Materials (1995), Inst. Phys. Conf. Ser. 142 (1996) p. 101.
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5
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6
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7
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8
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9
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10
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- Syväjärvi, M.¹ Yakimova, R.² Janzén, E.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.