Fabrication of metallic probes by a new technology based on double molding

Microelectronic Engineering

Volumn 41-42, Issue , 1998, Pages 543-546

  Beuret, C ^a   Niedermann, Ph ^b   Staufer, U ^a   De Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; METALS; MOLDING; NANOTECHNOLOGY;

SHARP METAL TIPS;

PROBES;

EID: 12844289136     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(98)00127-0     Document Type: Article

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