3-dimensional evaluation of nm-pores in porous low-k films using TEM stereoscopic / electron tomographic observation method

Materials Research Society Symposium Proceedings

Volumn 812, Issue , 2004, Pages 49-54

  Shimanuki, J ^a   Inoue, Y ^a   Shimada, M ^b   Ogawa, S ^b  

^a NISSAN ARC LTD   (Japan)

^b SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; AMORPHOUS FILMS; ELECTRIC IMPEDANCE TOMOGRAPHY; ELECTRON BEAMS; EVALUATION; IMAGE ANALYSIS; IMAGE RECONSTRUCTION; IMAGE SEGMENTATION; LIGHT SCATTERING; MATHEMATICAL MODELS; PERMITTIVITY; PORE SIZE; THREE DIMENSIONAL; TRANSMISSION ELECTRON MICROSCOPY;

3-D RECONSTRUCTION IMAGES; ELECTRON TOMOGRAPHY; PORE IMAGING; SPATIAL DISTRIBUTION;

DIELECTRIC FILMS;

EID: 12844254333     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-812-f5.2     Document Type: Conference Paper

References (4)

1. L. W. Hrubesh et al., J. Mater. Res. 8, 1736 (1993)
2. M. Rasco et al., in proc. 2002 IITC, P.74 (2002)
3. W. Wu et al., J. Appl. Phys. 87, 1193 (2000)
4. S. Ogawa et al., in proc. 2003 IITC, P. 100 (2003)