Realization of a large area microbolometer sensor array for submillimeter astronomy applications: SCUBA-2

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5498, Issue , 2004, Pages 407-415

  Parkes, W ^a   Gundlach, A M ^a   Dunare, C C ^a   Terry, J G ^a   Stevenson, J T M ^a   Walton, A J ^a   Schulte, E ^b  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

^b RAYTHEON COMPANY   (United States)

Author keywords

Bump bonding; Deep etching; Fusion bonding; MEMS; Microfabrication; Nitride membrane; SCUBA 2

Indexed keywords

ARRAYS; ELECTRIC IMPEDANCE; FABRICATION; IMAGING TECHNIQUES; MICROELECTROMECHANICAL DEVICES; MULTIPLEXING; SIGNAL TO NOISE RATIO; SQUIDS;

BUMP BONDING; DEEP ETCHING; FUSION BONDING; MICROFABRICATION; NITRIDE MEMBRANES; SCUBA-2;

BOLOMETERS;

EID: 12744272129     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.550401     Document Type: Conference Paper

References (15)

1. D. Audley, W.S. Holland, T. Hodson, M.J. MacIntosh, I. Robson, K.D. Irwin, G.C. Hilton, W.D. Duncan, W. Parkes, A. Walton, P. Ade, I. Walker, M. Fich, M. Halpern, D.A. Naylor, G. Mitchell, P. Bastien, "An update on the SCUBA-2 project", these proceedings.
2. A.J. Walton, W. Parkes, J.G. Terry, C. Dunare, J.T.M. Stevenson, A.M. Gundlach, G.C. Hilton, K.D. Irwin, J.N. Ullom, W.S. Holland, W.D. Duncan, M.D. Audley, P.A.R. Ade, R.V. Sudiwala and E. Schulte: "Design and fabrication of the detector technology for SCUBA-2", IEE Proc.-Sci. Meas. Technol. 151, (2), pp. 110-120, 2004.
3. K.D. Irwin, S. Deiker, W. Doriese, W. Duncan, G. Hilton, K. Lehnert, C. Reintsema, J. Ullom, L. Vale, "Multiplexed superconducting transition-edge sensor arrays", these proceedings.
4. G.C. Hilton, J.M. Martinis, K.D. Irwin, N.F. Bergren, D.A. Wollman, M.E. Huber, S. Deiker, S.W. Nam, "Microfabricated transition-edge x-ray detectors", IEEE Trans. Appl. Supercond. 11 (1), pp. 739-742, 2001.
5. th International Workshop on Low Temperature Detectors, ed. F. Gatti, Nuclear Instruments and Methods in Physics Research A 520 (1-3), pp. 544-547, 2004.
6. K.D. Irwin, "SQUID multiplexers for transition-edge sensors", Physica C, 368, pp. 203-210, 2002.
7. th International Workshop on Low Temperature Detectors, ed. F. Gatti, Nuclear Instruments and Methods in Physics Research A 520 (1-3), pp. 479-482, 2004.
8. th International Workshop on Low Temperature Detectors, ed. F. Gatti, Nuclear Instruments and Methods in Physics Research A 520 (1-3), pp. 483-486, 2004.
9. N. Potter, S. Belyo, M. Bertram, D. Gibson, L. Gilg, W. Parmon, R. Simmons, R. Miracky, "High performance packaging for superconducting electronics", Proc. Technical Program, NEPCON West, Anaheim, USA, 7-11 February 1993, pp. 944-953.
10. N.F. Mott, Metal-Insulator Transitions, Taylor & Francis, London, 1990.
11. David Chivers, Ion Beam Services, Unit 36B, Inchmuir Road, Whitehill Ind. Est., Bathgate, EH48 2EP, UK
12. Q.-Y. Tong, U. Gosele, Semiconductor Wafer Bonding, John Wiley, New York, 1999.
13. H.A. Macleod, Thin-film optical filters, Adam Hilger Ltd, Bristol, 1986.
14. Mandy Indars, Valley Design East, 63 Power Rd., Westford, MA 01886, USA
15. F. Laermer and A. Schilp: "Method for anisotropic plasma etching of substrates", U.S. Patent 5,498,312, 1996.