Diffractive optical elements: Design and fabrication at TASC-INFM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5227, Issue , 2003, Pages 178-186

  Di Fabrizio, Enzo ^a   Cojoc, Dan ^a,b   Cabrini, Stefano ^a   Businaro, Luca ^a   Gerardino, Ana Maria ^c   Romanato, Filippo ^a   Altissimo, Matteo ^a   Vaccari, Lisa ^a  

^a SINCROTRONE TRIESTE   (Italy)

^b UNIVERSITY POLITEHNICA OF BUCHAREST   (Romania)

^c Ist di Elettron dello Stato Solido   (Italy)

Author keywords

Diffractive optical elements; Lithography; X ray microscopy; X ray zone plates

Indexed keywords

CHARGE COUPLED DEVICES; ETCHING; FABRICATION; FUNCTIONS; LIGHT POLARIZATION; LIGHT REFLECTION; LITHOGRAPHY; OPTICAL SENSORS; OPTICAL SYSTEMS; SCANNING ELECTRON MICROSCOPY; X RAYS;

DIFFRACTIVE OPTICAL ELEMENTS (DOE); X-RAY MICROSCOPY; X-RAY ZONE PLATES;

DIFFRACTIVE OPTICS;

EID: 1242331321     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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