Fine gold grating fabrication on glass plate by imprint lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5220, Issue , 2003, Pages 74-81

  Hirai, Yoshihiko ^a   Ushiro, Toshihiko ^b   Kanakugi, Tomohiro ^a   Matsuura, Takashi ^b  

^a Osaka Prefecture University   (Japan)

^b SUMITOMO ELECTRIC INDUSTRIES LTD   (Japan)

Author keywords

Gold; Grating; Imprint lithography; Nano fabrication; Optical element; Polar device

Indexed keywords

CHEMICAL VAPOR DEPOSITION; LITHOGRAPHY; METALLIC FILMS; OPTICAL SYSTEMS; PLASTIC DEFORMATION; SILICON NITRIDE;

IMPRINT LITHOGRAPHY; POLAR DEVICES;

NANOTECHNOLOGY;

EID: 1242331006     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.505408     Document Type: Conference Paper

References (6)

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4. for example, http://www.nanoopto.com/
5. S. Chou, P. Krauss and P. Renstrom: "Nanoimprint lithography", J. Vac. Sci. Technol. B14, pp.4129-4133, 1996.
6. S.Pang, T. Tamamura, M. Nakao, A. Ozawa and H. Masuda:, "Direct nano-printing on Al substrate using a SiC mold", J. Vac. Sci. Technol., B16, pp. 1145-1149, 1998.