Form birefringent retardation plates in GaAs substrates: Design, fabrication, and characterization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5225, Issue , 2003, Pages 69-77

  Nezhad, M P ^a   Tsai, C ^a   Pang, L ^a   Nakagawa, W ^a   Klemens, G ^a   Fainman, Y ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Form birefringence; Gallium arsenide; Null ellipsometery; RCWA; Subwavelength gratings; Thermal expansion; Thermal refractive index dependence; Tunability

Indexed keywords

ALGORITHMS; ANISOTROPY; ANTIREFLECTION COATINGS; BIREFRINGENCE; ELLIPSOMETRY; FOURIER TRANSFORMS; LIGHT POLARIZATION; LITHOGRAPHY; OPTICAL DESIGN; OPTOELECTRONIC DEVICES; REFRACTIVE INDEX; THERMAL EXPANSION;

FORM BIREFRINGENCE; NULL ELLIPSOMETERY; RCWA; SUBWAVELENGTH GRATINGS; THERMAL REFRACTIVE INDEX DEPENDENCE; TUNABILITY;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 1242308780     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.506672     Document Type: Conference Paper

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