Poly (ethylene terephthalate) decomposition process in oxygen plasma; emission spectroscopic and surface analysis for oxygen-plasma reaction

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 1, 2004, Pages 1-7

  Kumagai, Hidetoshi ^a   Hiroki, Denbo ^a   Fujii, Nobuyuki ^a   Kobayashi, Takaomi ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBONIZATION; DECOMPOSITION; EMISSION SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT EMISSION; MICROWAVES; OXIDATION; PLASMA ETCHING; PLASMA FLOW; PLASMA INTERACTIONS; SURFACE REACTIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

EMISSION BANDS; OXYGEN PLASMA REACTIONS;

POLYETHYLENE TEREPHTHALATES;

EID: 1242306917     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1624286     Document Type: Article

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