Creep characteristics of combined bulk acoustic wave quartz resonator force sensors

Sensors and Actuators, A: Physical

Volumn 111, Issue 2-3, 2004, Pages 203-209

  Wang, Zheyao ^a,b   Dong, Yonggui ^a   Zhu, Huizhong ^a   Feng, Guanping ^a  

^a TSINGHUA UNIVERSITY   (China)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Creep; Epoxy; Force sensor; Quartz resonator

Indexed keywords

ACOUSTIC WAVES; COSTS; CREEP; CRYSTAL RESONATORS; ELASTICITY; FREQUENCIES; MATHEMATICAL MODELS; PROFILOMETRY; QUARTZ; SENSITIVITY ANALYSIS; STRESS CONCENTRATION; SURFACE ROUGHNESS; VISCOELASTICITY;

EPOXY; FORCE SENSORS; QUARTZ RESONATORS;

SENSORS;

EID: 1242276202     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.036     Document Type: Article

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