Regularization embedded nonlinear control designs for input-constrained and Ill-conditioned thermal system

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 126, Issue 3, 2004, Pages 574-582

  Gwak, Kwan Woong ^a   Masada, Glenn Y ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EMBEDDED NONLINEAR CONTROL DESIGN; LINEAR ALGEBRAIC EQUIVALENCE OF THE NONLINEAR CONTROLLERS (LAENC); SINGULAR VALUE DECOMPOSITION (SVD); THERMAL SYSTEMS;

ALGORITHMS; ANNEALING; CONSTRAINT THEORY; INTEGRAL EQUATIONS; LINEAR ALGEBRA; MATHEMATICAL MODELS; NONLINEAR CONTROL SYSTEMS; THERMAL EFFECTS;

EMBEDDED SYSTEMS;

EID: 12344333640     PISSN: 00220434     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1789973     Document Type: Article

References (24)

1. Howell, J. R., 2001, Class Notes for Inverse Design of Thermal Systems with Dominant Radiative Transfer, The University of Texas at Austin.
2. Erturk, H., Ezekoye, O. A., and Howell, J. R., 2000, "Inverse Solution of Radiative Heat Transfer in Two-Dimensional Irregularly Shaped Enclosures," Proc. 2000 IMECE, ASME HTD, Vol. 366-1, pp. 109-116.
3. Erturk, H., Ezekoye, O. A., and Howell, J. R., 2001, "Inverse Transient Boundary Condition Estimation Problem in a Radiating Enclosure," Proc. 2001 ASME National Heat Transfer Congress.
4. Erturk, H., Ezekoye, O. A., and Howell, J. R., 2001, "Inverse Design of a Three Dimensional Furnace With Moving Design Environment," Proc. 2001 IMECE, ASME HTD.
5. Morales, J. C., 1998, "Radiation Exchange Within Enclosure of Diffuse Gray Surfaces: The Inverse Problem," Ph.D. dissertation, Department of Mechanical Engineering, The University of Texas at Austin.
6. Hansen, P. C., 1998, Rank-Deficient and Discrete Ill-Posed Problems: Numerical Aspects of Linear Inversion, Soc. Industrial and Applied Mathematics, Philadelphia.
7. Hansen, P. C., 1992, "Numerical Tools for Analysis and Solution of Fredholm Integral Equations of the First Kind," Inverse Probl., 8, pp. 849-872.
8. Breedijk, T., Edgar, T. F., and Trachtenberg, I., 1994, "Model-Based Control of Rapid Thermal Processes," Proc. of American Control Conference, pp. 887-891.
9. Norman, S. A., and Boyd, S. P., 1992, "Multivariable Feedback Control of Semiconductor Wafer Temperature," Proc. of American Control Conference, pp. 811-816.
10. Huang, C. J., Yu, C. C., and Shen, S. H., 2000, "Selection of Measurement Locations for the Control of Rapid Thermal Processor," Automatica, 36, pp. 705-715.
11. Cho, Y. M., and Gyugyí, P., 1997, "Control of Rapid Thermal Processing: A System Theoretic Approach," IEEE Trans. Control Syst. Technol., 5, pp. 644-653.
12. Balakrishinan, K. S., and Edgar, T. F., 2000, "Model-Based Control in Rapid Thermal Processing," Thin Solid Films, 365, pp. 322-333.
13. Elia, C. F., 1994, "RTP Multivariable Temperature Controller Development," Proc. of American Control Conference, pp. 907-912.
14. Choi, J. Y., and Do, H. Y., 2001, "A Learning Approach of Wafer Temperature Control in a Rapid Thermal Processing System," IEEE Trans. Semicond. Manuf., 14, pp. 1-10.
15. Baker, J., and Christofides, P. D., 1999, "Output Feedback Control of Parabolic PDE System With Nonlinear Spatial Differential Operators," Ind. Eng. Chem. Res., 38, pp. 4372-4380.
16. Park, H. M., Yoon, T. Y., and Kim, O. Y., 1999, "Optimal Control of Rapid Thermal Processing Systems by Empirical Reduction of Modes," Ind. Eng. Chem. Res., 38, pp. 3964-3975.
17. Schaper, C. D., Kailath, T., and Lee, Y. J., 1999, "Decentralized Control of Wafer Temperature for Multizone Rapid Thermal Processing Systems," IEEE Trans. Semicond. Manuf., 12, pp. 193-199.
18. Aling, H. et al., 1995, "Application of Feedback Linearization to Models of Rapid Thermal Processing (RTP) Reactors," 3rd Inl'l Rapid Thermal Processing Conference-RTP'95, pp. 356-366.
19. Balakrishnan, K. S., Cho, W., and Edgar, T. F., 1994, "Comparison of Controller Tuning Methods for Temperature Uniformity Control in a Rapid Thermal Processor," Proc. SPIE, 2336, pp. 70-80.
20. Isidori, A., 1994, Nonlinear Control Systems, 3rd edition, Springer-Verlag.
21. Slotine, J. J. E., and Li, W., 1991, Applied Nonlinear Control, Prentice-Hall.
22. Utkin, V., Guldner, J., and Shi, J., 1999, Sliding Mode Control in Electromechanical Systems, Taylor & Francis.
23. Utkin, V., 1992, Sliding Modes in Control Optimization, Springer-Verlag.
24. Edwards, C., and Spurgeon, S. K., 1998, Sliding Mode Control: Theory and Applications, Taylor & Francis.