Surface micromachining and characterization of a pyroelectric infrared ray focal plane array utilizing SiO2 as the IR absorbing layer

Journal of Micromechanics and Microengineering

Volumn 15, Issue 1, 2005, Pages 104-108

  Ryu, S O ^a   Cho, S M ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRICITY; HYSTERESIS; INFRARED SPECTROSCOPY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PYROELECTRICITY; SILICA; THIN FILMS; TRANSFER FUNCTIONS;

INFRARED RAY (IR) FOCAL PLANE ARRAY (FPA); MODULATION TRANSFER FUNCTIONS (MTF); OSCILLATION FREQUENCIES; PYROELECTRIC THIN FILMS;

INFRARED DETECTORS;

EID: 12344313089     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/016     Document Type: Article

References (9)

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