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Volumn 71, Issue 5, 2004, Pages 691-696

A general solution for two-dimensional stress distributions in thin films

Author keywords

[No Author keywords available]

Indexed keywords

DEFECT INCORPORATION; FILM-SUBSTRATE INTERFACE; STRESS-FREE STRAINS; THIN FILM GROWTH;

EID: 12344285167     PISSN: 00218936     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1782649     Document Type: Article
Times cited : (4)

References (17)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.