Coherence management for microlens laser beam homogenizers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4775, Issue , 2002, Pages 145-154

  Erdmann, Lars ^a   Burkhardt, Matthias ^a   Brunner, Robert ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

Coherence; Excimer Laser; Homogenizer; Microlens

Indexed keywords

COHERENT LIGHT; COMPUTER SIMULATION; MICROLENSES; OPTICAL MICROSCOPY; OPTICAL SYSTEMS; OPTICAL VARIABLES CONTROL; SPECKLE; ULTRAVIOLET RADIATION;

DEEP ULTRAVIOLET MICROSCOPY; MICROLENS LASER BEAM HOMOGENIZERS; SPECKLE REDUCTION;

LASER BEAMS;

EID: 0036453484     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.479646     Document Type: Conference Paper

References (5)

1. Ximing Deng et al., "Uniform illumination of large targets using a lens array," Appl. Opt., Vol. 25, No. 3, pp. 377-381, 1986.
2. S. N. Natarovski and N. M. Nikiforovski, "Design of raster illuminators working with a point source," Sov. J. Opt. Technol. 54, pp. 150-152, 1987.
3. Fred M. Dickey and D. O'Neil, "Multifaceted laser beam integrators: General formulation and design concepts," Opt. Eng. 27, pp. 999-1007, 1988
4. F. M. Dickey and S. C. Holswade, Laser beam shaping, p. 287, Marcel Dekker Inc., New York
5. J. Goodman, Introduction to Fourier Optics, pp. 57-61, McGraw-Hill, New York (1985)