Cyclic micro-bending and plasticity length scales in LIGA nickel MEMS structures

Proceedings of the TMS Fall Meeting

Volumn , Issue , 2002, Pages 329-334

  Lou, J ^a   Shrotriya, P ^b   Buchheit, T ^c   Soboyejo, W O ^a  

^a Princeton University   (United States)

^b Brown University   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; MICROELECTROMECHANICAL DEVICES; OPTICAL MICROSCOPY; PLASTICITY; SCANNING ELECTRON MICROSCOPY; STRAIN; STRESSES;

BACK STRESS EFFECTS; CYCLIC DEFORMATION; CYCLIC FAILURE PHENOMENA; CYCLIC MICRO-BENDING; CYCLIC STRESS STRAIN EVOLUTION; PLASTICITY LENGTH SCALES;

NICKEL;

EID: 12244310526     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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