Molecular SIMS for organic layers: New insights

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 160-165

  Bertrand, P ^a   Delcorte, A ^a   Garrison, B J ^b  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Disappearance cross section; Ejection radius; Ion emission; Kinetic energy distribution; MD simulation; Polymer; Secondary ion mass spectrometry; ToF SIMS

Indexed keywords

COMPUTER SIMULATION; ION BEAMS; ION BOMBARDMENT; IONIZATION; KINETIC ENERGY; MOLECULES; SECONDARY ION MASS SPECTROMETRY;

ION BEAM BOMBARDMENT;

SURFACE PHENOMENA;

EID: 12244308474     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00722-5     Document Type: Conference Paper

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