Using SIMS and the NIST standard reference material #2137 to calibrate standards used in the 11 B(p, α) 8 Be nuclear reaction analysis of B in Si

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 310-313

  Magee, Charles W ^a   Jacobson, Dale C ^b,c  

^a Evans East   (United States)

^b AGERE SYSTEMS   (United States)

^c Ceradyne Inc   (United States)

Author keywords

Calibration; NRA; Reference; SIMS

Indexed keywords

CALIBRATION; ION IMPLANTATION; SECONDARY ION MASS SPECTROMETRY; SILICON;

NUCLEAR REACTIONS;

BORON;

EID: 12244303614     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00666-9     Document Type: Conference Paper

References (1)

1. Magee C.W., Jacobson D.C., Gossmann H.-J. J. Vac. Sci. Technol. B. 1(18):2000;489.