Effects of Nb doping on highly fatigue-resistant thin films of (Pb 0.8Ba0.2)ZrO3 for ferroelectric memory application

Journal of Crystal Growth

Volumn 274, Issue 3-4, 2005, Pages 402-406

  Hung, Cheng Lung ^a   Wu, Tai Bor ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

A1. Doping; A3. Polycrystalline deposition; B1. Oxides; B2. Ferroelectric materials

Indexed keywords

ANNEALING; DEPOSITION; ELECTRODES; FATIGUE OF MATERIALS; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; LEAKAGE CURRENTS; MAGNETRON SPUTTERING; NIOBIUM; OXIDES; POLARIZATION; POLYCRYSTALLINE MATERIALS; SWITCHING; THIN FILMS; ZIRCONIUM COMPOUNDS;

FATIGUE-RESISTANCE; FERROELECTRIC MEMORY (FERAM); POLYCRYSTALLINE DEPOSITION; POSTANNEALING (PA);

DOPING (ADDITIVES);

EID: 12244272456     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2004.10.013     Document Type: Article

References (17)

1. J.F. Scott, and C.A. Paz de Araujo Science 246 1989 1400
2. O. Auciello, J.F. Scott, and R. Ramesh Phys. Today 51 1998 22
3. G.H. Haertling J. Am. Ceram. Soc. 82 1999 797
4. J. Chen, M.P. Harmer, and D.M. Smith J. Appl. Phys. 76 1994 5394
5. W.L. Warren, D. Dimos, B.A. Tuttle, R.D. Nasby, and G.E. Pike Appl. Phys. Lett. 65 1994 1018
6. J.J. Lee, C.L. Thio, and S.B. Desu J. Appl. Phys. 78 1995 5073
7. Y. Ding, J.S. Liu, H.X. Qin, J.S. Zhn, and Y.N. Wang Appl. Phys. Lett. 78 2001 4175
8. U. Chon, G.C. Yi, and H.M. Jang Appl. Phys. Lett. 78 2001 658
9. G. Seirnet Phys. Rev. 86 1952 219
10. J.H. Tseng, and T.B. Wu Appl. Phys. Lett. 78 2001 1721
11. R.D. Klissurska, A.K. Tagantsev, K.G. Brooks, and N. Setter J. Am. Ceram. Soc. 80 1997 336
12. S. Aggarwal, I.G. Jenkins, B. Nagaraj, C.J. Kerr, C. Canedy, R. Ramesh, G. Velasquez, L. Boyer, and J.T. Evans Appl. Phys. Lett. 75 1999 1787
13. S.B. Majumder, B. Roy, R.S. Katiyar, and S.B. Krupanidhi J. Appl. Phys. 90 2001 2975
14. K. Tominaga, A. Shirayanagi, T. Takagi, and M. Okada Jpn. J. Appl. Phys. 32 1993 4082
15. Dimos, R.W. Schwartz, and S.J. Lockwood J. Am. Ceram. Soc. 77 1994 3000
16. A. Al-Shareef, and D. Dimos J. Am. Ceram. Soc. 80 1997 3127
17. D. Bolten, U. Böttger, T. Schneller, M. Grossmann, O. Lohse, and R. Waser Appl. Phys. Lett. 77 2000 3830