High-Q Inductors on Digital VLSI CMOS Substrate for Analog RF Applications

SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference Proceedings

Volumn , Issue , 2003, Pages 869-872

  Ellinger, Frank ^a   Kossel, Marcel ^b   Huber, Meik ^a   Schmatz, Martin ^b   Kromer, Christian ^a   Sialm, Gion ^a   Barras, David ^a   Rodoni, Lucio ^a   Von Büren, George ^a   Jäckel, Heinz ^a  

^a ETH ZURICH   (Switzerland)

^b IBM RESEARCH ZURICH   (Switzerland)

Author keywords

Complementary metal oxide semiconductor (CMOS); Inductors; Microwave integrated circuits (MMIC); Quality factor; Very large scale integration (VLSI)

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC CONDUCTIVITY; ELECTRIC POTENTIAL; FREQUENCIES; LOGIC CIRCUITS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; MICROWAVE INTEGRATED CIRCUITS; PRODUCT DESIGN; RESONANCE; SILICON ON INSULATOR TECHNOLOGY; VLSI CIRCUITS;

ANALOG RADIO FREQUENCY (RF); QUALITY FACTORS;

ELECTRIC INDUCTORS;

EID: 12144291125     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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