Energy dispersive X-ray spectroscopy with microcalorimeters

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 520, Issue 1-3, 2004, Pages 606-609

  Hollerith, C ^a   Wernicke, D ^a,b   Buhler M ^b   Feilitzsch, F V ^a   Huber, M ^a   Hohne J ^b   Hertrich, T ^b   Jochum, J ^a   Phelan, K ^b   Stark, M ^a   Simmnacher, B ^c   Weiland, W ^c   Westphal, W ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b VeriCold Technologies GmbH   (Germany)

^c INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Energy dispersive spectroscopy (EDS); Material science; Transition edge sensor (TES)

Indexed keywords

CRYOGENICS; EDGE DETECTION; ENERGY DISPERSIVE SPECTROSCOPY; HIGH RESOLUTION ELECTRON MICROSCOPY; MATERIALS SCIENCE; SCANNING ELECTRON MICROSCOPY; SENSORS; WAVELENGTH DISPERSIVE SPECTROSCOPY; X RAY SPECTROMETERS;

MICROCALORIMETERS; TRANSITION EDGE SENSORS (TES);

CALORIMETERS;

EID: 12144290407     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2003.11.327     Document Type: Conference Paper

References (3)

1. G. Thummes, M. Theiß, M. Bühler, J. Höhne, Reaching 96 mK by a pulsetube precooled adiabatic demagnetization refrigerator, in: R.G. Ross Jr. (Ed.), Cryocoolers 11. Plenum Press, New York, 2001, p. 597. Proceedings of the 11th International Cryocooler Conference, Keystone, Colorado, USA, 2000.
2. G. Thummes, M. Theiß, M. Bühler, J. Höhne, Reaching 96 mK by a pulsetube precooled adiabatic demagnetization refrigerator, in: R.G. Ross Jr. (Ed.), Cryocoolers 11. Plenum Press, New York, 2001, p. 597. Proceedings of the 11th International Cryocooler Conference, Keystone, Colorado, USA, 2000.
3. B. Simmnacher, R. Weiland, E. Langer, M. Bühler, J. Höhne, C. Hollerith, Microcalorimeter energy dispersive X-ray spectroscopy in routine semiconductor failure analysis, Conference Proceedings of the 28th International Symposium for Testing and Failure Analysis (ISTFA), Phoenix/AZ, November 2002, p. 87.