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Volumn 453-454, Issue , 2004, Pages 323-327
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Finite element analysis of the initial stages of the laser ablation process
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Author keywords
Coatings; Finite elements method; Laser ablation
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Indexed keywords
COATINGS;
EXCIMER LASERS;
FILM GROWTH;
FINITE ELEMENT METHOD;
IRRADIATION;
LASER ABLATION;
MORPHOLOGY;
MULTILAYERS;
PULSED LASER DEPOSITION;
SCANNING ELECTRON MICROSCOPY;
SILICON WAFERS;
SOLUTIONS;
SURFACE ROUGHNESS;
PLASMA PLUMES;
THERMAL ABLATION;
THIN FILMS;
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EID: 12144289778
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2003.11.147 Document Type: Conference Paper |
Times cited : (25)
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References (17)
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