P2 desorption from phosphine decomposition on Si(100) surfaces

Langmuir

Volumn 14, Issue 6, 1998, Pages 1428-1434

  Jacobson, Michael L ^a,b   Chiu, Michael C ^a   Crowell, John E ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Stacey Memorial ^*

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ADSORPTION; AUGER ELECTRON SPECTROSCOPY; DECOMPOSITION; HYDROGEN; MONOLAYERS; REACTION KINETICS; SILICON; SURFACE PHENOMENA; TEMPERATURE PROGRAMMED DESORPTION;

PHOSPHINES;

PHOSPHORUS COMPOUNDS;

EID: 11744293751     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la970795w     Document Type: Article

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